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Motion Control and Communication

Motion control and management in semiconductor processing is one of the most important manufacturing elements in the semiconductor industry. It requires high automation standards for wafer processing, wafer transport, and process assembling. Advantech provides complete machine motion control solutions for wafer handling and robot arms.

CODESYS is a third-party manufacturer of independent IEC 61131-3 automation software for engineering control systems. The offerings are flexible and include powerful visualization management to meet the requirements of the semiconductor industry.

Volatile Organic Compound Emission Monitoring

In semiconductor or panel production procedures, there are various common or special gases and high- erosion liquids that are crucial and widely adopted. Ingredients, purity and stability depend on the production rate. Once impurities exceed the standard value and spread to the whole pipe system, it will break down the production line—this means extra costs and extra efforts for recovery. Therefore, 24/7 monitoring of the organic compounds of gases and liquids in the pipes is crucial.

The ADAM-6700 series boasts intelligent, I/O-integrated gateway devices with a unique all-in-one design. The devices collect data on liquid level, PH value, pressure, temperature, parameter changes from the gas and liquid pipes, and also collects and integrates data from ADAM-6000 series devices and different meters via Ethernet and RS-485. With its built-in intellectual analysis functions, if an abnormality is detected, it can trigger an alert and send email notifications immediately.

ADAM-6000 Series

ADAM-6000 modules are empowered by Peer-to-Peer (P2P) and Graphic Condition Logic (GCL), and can perform as standalone products for measurement, control and automation wiith Advantech's P2P and GCL technology.

ADAM-6700 Series

ADAM-6700 is the intelligent I/O gateway that offers an integrated solution in the form of a Linux-based gateway.

Motion Control and Management

In semiconductor or panel production procedures, high-priced wafer and panel transfer within work stations relies on the stability and reliability of a robot. If the robot malfunctions, it will take one day to remove the robot from a work station and likely 14 days to repair by the original manufacturer. This means massive costs and downtime for manufacturers.

Advantech has SoftPLC and soft motion controller solutions as a single integrated interface for conducting real-time machine control. By enabling dual fieldbus data acquisition (PROFINET, CANopen), we provide a cost-effective tool for PC-based soft motion control, communication, and HMI functions. With a diverse range of technologies, Advantech is a strong supporter in control management in the semiconductor industry.

Robot Arm Stability Monitoring

16-ch Isolated DI and 16-ch Isolated DO EtherCAT Remote I/O Module

Wafer Pick and Place

CODESYS SoftMotion& Visualization (Target & Web) Runtime


Real-time SoftPLC & SoftMotion Cabinet Controller

Process Visualization

CODESYS SoftMotion& Visualization (Target & Web) Runtime


Visualized Real-time SoftLogic Panel Controller

EtherCAT-Based Control Solutions

Advantech offers a variety of distributed I/O and motion control EtherCAT adapter modules, such as isolated digital input, isolated digital output, photoMOS relay output, relay contact, analog input/output, pulse output, and junction modules, to satisfy diverse control application needs. EtherCAT Fieldbus gateways provide seamless communication between fieldbus and industrial Ethernet devices that use different communication protocols. Designed specifically for reliable protocol extensibility and seamless integration with existing network devices, EtherCAT protocol gateways offer a viable solution for efficiently converting data from devices that use different protocols.


Intel® Core™ i7/i5/Celeron® Control IPC With EtherCAT Slice I/O Expansion


8-ch, 16-bit Isolated Analog Input EtherCAT Remote I/O Module


Intel® Celeron® J1900 Small-Size DIN-rail Control PC

EKI-1242 Series

Industrial Fieldbus Gateway

Other Product Offerings

Motion Controller

Intel® Core™ i Automation Computer

Industrial Communication
EKI-7700 Series

Industrial Managed Ethernet Switch

EKI-2000 Series

Industrial Unmanaged Ethernet Switch

EKI-1520 Series

Industrial Serial-to-Ethernet Device Server



CODESYS Edge Controller


ADAM Industrial Data Acquisition Success Story Collection